| 品名 | 敘述 | 詢價 |
|---|---|---|
| CMP-M Series | Memory, Cu, W, acidic type CMP-M series post CMP cleaning solution is formulated chemicals designed specifically for post copper and tungsten CMP cleaning. CMP-M series cleaners have outstanding cleaning performance for particles and metals and cost reduction with high dilution ratio. | |
| Acidic post CMP cleaning solution | Memory, Cu, W, acidic type CMP-M series post CMP cleaning solution is formulated chemicals designed specifically for post copper and tungsten CMP cleaning. CMP-M series cleaners have outstanding cleaning performance for particles and metals and cost reduction with high dilution ratio. | |
| CMP-B Series | Memory, Cu, alkaline type CMP-B series post CMP cleaning solution is formulated chemicals designed specifically for post copper CMP cleaning with cobalt as barrier. CMP-B series cleaners have outstanding cleaning performance for particle, metal, and organic residue. It controls galvanic corrosion to barrier metals. High cost reduction POU dilution ratio more than 100 times. | |
| Alkaline post CMP cleaning solution | Memory, Cu, alkaline type CMP-B series post CMP cleaning solution is formulated chemicals designed specifically for post copper CMP cleaning with cobalt as barrier. CMP-B series cleaners have outstanding cleaning performance for particle, metal, and organic residue. It controls galvanic corrosion to barrier metals. High cost reduction POU dilution ratio more than 100 times. |